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On the left, an image of the final VO2 based MEMs device with the bimorph in blue. On the right, a top view of the device. This device was created under a cooperative research and development agreement between the Air Force Research Laboratory Sensors Directorate and Michigan State University. Image courtesy of Michigan State University.


VO2 based MEMs device

On the left, an image of the final VO2 based MEMs device with the bimorph in blue. On the right, a top view of the device. This device was created under a cooperative research and development agreement between the Air Force Research Laboratory Sensors Directorate and Michigan State University. Image courtesy of Michigan State University.

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Image courtesy of Michigan State University
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